Three-Zone Vertical Tube Furnace (Fluidized Bed FBCVD Furnace)

The Three-Zone Vertical Tube Furnace using Fluidized Bed Chemical Vapor Deposition (FBCVD) technology. In FBCVD technology, the reaction occurs within a fluidized bed region inside the furnace. Solid particles exhibit a boiling-like state due to the upward flow of gas, which not only increases the contact area between the material and the reactive gas but also promotes uniform heating and efficient conversion of reactants. This technology is commonly used for the preparation of various materials such as thin films and powders.

This equipment, in addition to the basic features of a standard three-zone tube furnace, has been optimized for fluidized bed reactions. Enhancements include improved gas flow and distribution to ensure a stable fluidized state in the fluidized bed region. In practical applications, it can be used for the growth of advanced materials such as carbon nanotubes and graphene, as well as the preparation and modification of catalysts.