1200.C Three Zone CVD Tube Furnace with Electrically Controlled Opening Door

1200.C Three Zone CVD Tube Furnace with Electrically Controlled Opening Door

Introduction

This Three-Zone CVD Tube Furnace offers flexible combinations of gas supply and vacuum systems, making it suitable for various thin film deposition processes.

It is widely used in the semiconductor industry for depositing thin film materials, including large-area insulating materials and most metallic and metal alloy materials. Our complete CVD coating systems are ideal for use in material laboratories of universities, research institutes, environmental science fields, and more.

Structure of Three-Zone CVD Tube Furnace

Features of Three-Zone CVD Tube Furnace

1. High-Purity Quartz Tube: Excellent corrosion resistance and high-temperature performance.
2. High-Purity Al2O3 Fiber Insulation: Superior thermal insulation, reducing power consumption.
3. Double-Layer Air-Cooling Structure: Efficient heat dissipation with a dual-layer air-cooling design.
4. Automatic Lifting Furnace Door: Easy access with an automatic lifting system for the furnace door.
5. Embedded Operating System: Bilingual (Chinese/English) interface, 7-inch touchscreen, real-time heating display, automatic report generation, and unlimited data export.
6. Integrated System: Includes multi-path gas supply, three-zone heating, and high-vacuum system.

Technical Parameters

Applications:

The 1200°C Three-Zone CVD Tube Furnace is ideal for a wide range of applications across various industries:

1. Semiconductor Industry:
   • Thin Film Deposition: Essential for the deposition of thin films in semiconductor device fabrication, including insulating, metallic, and alloy materials.
   • Oxidation and Diffusion Processes: Used in the production of integrated circuits (ICs), transistors, and microelectromechanical systems (MEMS).
2. Material Science & Research:
   • Nanomaterial Synthesis: Used for synthesizing advanced nanomaterials such as carbon nanotubes, graphene, and quantum dots.
   • Coating Technologies: For coating and modifying materials used in research and development, especially in high-performance applications like sensors, photovoltaics, and energy storage.
3. Solar Energy:
   • Photovoltaic Cells: Deposition of thin films for solar cells, ensuring high efficiency and durability under varying environmental conditions.
4. Environmental Science:
   • Catalysis and Environmental Research: Used for studying and developing catalytic materials and processes related to environmental protection, such as pollutant degradation and CO2 capture.
5. Optics & Electronics:
   • Optical Coatings: Thin film deposition for optics and display applications, including anti-reflective coatings, lenses, and mirrors.
   • Electrical Contacts: For the deposition of conductive materials in electronic components, including electrodes and interconnects.
6. Biomedical & Pharmaceutical:
   • Coatings for Medical Devices: Deposition of biocompatible thin films for medical implants and devices to improve their performance and longevity.
7. Energy Storage:
   • Battery & Supercapacitor Materials: Deposition of electrode materials for lithium-ion batteries, supercapacitors, and other energy storage devices.

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