OD120mm 3 Zone Nano CVD Furnace

The 3 Zone Nano CVD Furnace is an advanced chemical vapor deposition system, featuring three independent heating zones capable of precisely controlling temperature gradients across different regions, facilitating the synthesis and growth of nano-materials.

Description
SPECIFICATIONS

OD120mm 3 Zone Nano CVD Furnace

Introduction:

The ZYLAB Nano CVD Furnace offers with a flexible operating temperature of up to 1200°C, it integrates multiple temperature zone controllers into an intelligent system, allowing all parameters to be conveniently set via a touchscreen interface. Equipped with built-in gas flow meters, the furnace facilitates convenient atmosphere sintering. Its precision gas delivery system ensures accurate control of the gas phase environment to meet the requirements of nano-material growth. Additionally, real-time monitoring and control systems enable precise regulation of experimental conditions, providing efficient and reliable support for nano-material preparation.

Features and Benefits:

1. High purity quartz tube as furnace tube, Max. Temperature 1200.C(<1hour), continue working temperature Rt –1100.C.
2. 7”Color Touch screen LCD man-machine English interface, more intuitive and convenient operation, the graph of sintering curve with temperature changes makes you clear at a glance.
3. 30 segments programmable and auto control.
4. Can presetting 15 sintering curves to avoid the trouble caused by repeated settings of different experimental processes.
5. High purity alumina inorganic refractory, overall vacuum molding chamber, energy saving and ensure uniformity of temperature zone and a fast heating rate.
6. By using special lining import from Japan and high quality alloy heating wire with excellent acid and corrosion resistance, protected against chemical contamination at the best and longer service life.
7. Double layers steel casing with fan cooling, to ensure the surface of furnace below 50.C, safety for the operator.
8. Ring heating, open structure, convenient observation for operator, able to meet rapid sintering of small sample
9. Come with gas flowmeter, atmosphere sintering more convenient.
10. Unique flange has a multi-function test holes, insert the corresponding electrode to test tube temperature or atmosphere environment.
11. Three temperature zones, and each temperature zone can operate independently.
12. Can add modules to contol and download data remotely(optional).
13. Low power consumable, exquisite structure and light weight, it is the ideal tube furnace for material research labs, also used in factory for small production.

Main Technical Parameters of Nano CVD Furnace:

	No.	Type	Technical Parameters
Heating system	1	Furnace dimensions	L×W×H=1700mm×760mm×1200mm
	2	Reaction chamber dimensions	High-purity quartz, outer diameter 120mm, inner diameter 112mm*(200+400+200)mm, tube length 1400mm
	3	Main control working temperature	≤1150℃
	4	Opening method	Electrically open or close the furnace chamber through screen buttons for easy viewing of sample position and replacing the furnace tube
	5	heating rate	Recommended ≤20℃/min
	6	heating element	HRE (High-Resistance Element)
	7	furnace chamber material	Alumina fiber insulation refractory material
	8	temperature zone length	200+400+200mm
	9	Temperature control accuracy	±1℃
	10	Sealing method	Self-sealing, with temperature measurement hole and handheld thermometer
	11	Temperature measurement element	3 sets of K-type thermocouples for more uniform temperature control (three-zone temperature control) Provide the ability to set a thermal profile for each heating zone
Gas system configuration	12	Flow meter	2-channel float flow meter (0.1-1.5L/min, 20-200ml/min)
	13	Pressure gauge	Mechanical vacuum pressure gauge
	14	Regulating valve	Manual regulating valve
	15	Pipeline connection method	Double-card sleeve PTFE tubing connection（φ6.35）
	16	Pressure range	-0.1-0.15Mpa (absolute pressure)
Opening system	17	Transmission mode	Lever transmission
	18	Motor	DC linear actuator motor
	19	Sensor type	Two sets of displacement sensors to prevent loss of control
Vacuum system	20	Vacuum pump	Mechanical vacuum pump: Direct-drive rotary vane vacuum pump (two-stage rotary vane)
	21	Pumping rate	9.9(m³/H)
	22	Inlet/outlet connection	KF25（mm）
	23	Motor speed	1440（rpm）
	24	Ambient Temperature	5～40℃
	25	Noise level (dB)	≤56
	26	Vacuum gauge	Digital vacuum gauge, capable of digitally displaying the pressure inside the furnace tube
	27	Vacuum level	5-10Pa
	28	Pressure sensor	Displays positive pressure inside the tube and allows for setting of overpressure alarms
	29	Differential pressure sensor	Maintains a certain pressure difference inside the tube
Control system	35	Control mode	Embedded operating system with graphical interface in both Chinese and English, 7-inch color touchscreen input, intelligent human-machine dialogue mode
	36	Temperature curve setting	can store up to 15 temperature curves, each curve can be set with 30 segments of “time-temperature curve,” real-time monitoring, dynamically displaying the “time-temperature curve”
	37	Temperature calibration	Non-linear correction of the temperature difference between the temperature control temperature and the sample temperature throughout the system
	38	Equipment operation time recording	Sintering data storage, automatic report generation, real-time recording and retrieval
	39	System protection	Over-temperature alarm, over-current protection, open circuit prompt
Others	40	Electrical specifications	AC208-380V 50/60HZ(as required) 8KW
	41	Included accessories	1 furnace tube, 1 set of sealing flanges, 1 user manual, miscellaneous tools, etc.
	42	Warranty	12 months warranty for the equipment, 24 months for the touchscreen system, lifetime support.

Optional:

Additional tubes: high purity quartz tube Dia 120*1400mm
Quartz stands: quartz curcible(as requirement)

Applications:

MoS2 Growth: Our three-zone CVD furnace enables the vertical or horizontal growth of MoS2 by precisely controlling temperature gradients and gas phase composition across different temperature zones, resulting in MoS2 flakes with desired morphology and crystal structure.

Graphene Growth: It provides suitable gas phase environment and temperature gradients to promote graphene growth. By controlling the growth conditions, the number of layers, lattice structure, and defect density of graphene can be modulated, obtaining graphene materials with desired properties.

hBN Growth: The three-zone CVD furnace can provide appropriate gas phase composition and temperature conditions to achieve high-quality hBN growth. Through precise control, hBN flakes with high uniformity and excellent lattice structure can be obtained.

Carbon Nanotube (CNT) Growth: For one-dimensional materials such as carbon nanotubes, it provides suitable carbon source gas phase and temperature conditions to facilitate the aggregation and growth of carbon atoms on the catalyst surface, thus realizing the preparation of carbon nanotubes. By controlling the growth conditions and catalyst selection, the diameter, length, and structural characteristics of carbon nanotubes can be adjusted to meet various application requirements.