Laboratory Compact Fluidized Bed FBCVD Furnace

Laboratory Compact Fluidized Bed FBCVD Furnace

Introduction:

This Fluidized Bed FBCVD Furnace, in addition to the basic features of a standard three-zone tube furnace, has been optimized for fluidized bed reactions. Enhancements include improved gas flow and distribution to ensure a stable fluidized state in the fluidized bed region. In practical applications, it can be used for the growth of advanced materials such as carbon nanotubes and graphene, as well as the preparation and modification of catalysts.

In FBCVD technology, the reaction occurs within a fluidized bed region inside the furnace. Solid particles exhibit a boiling-like state due to the upward flow of gas, which not only increases the contact area between the material and the reactive gas but also promotes uniform heating and efficient conversion of reactants. This technology is commonly used for the preparation of various materials such as thin films and powders.

Features and Benefits:

1. High-temperature sintering.
2. Stable and reliable control, convenient operation, and comprehensive safety measures.
3. Advanced PID self-learning fuzzy control, high temperature control accuracy, maintained within ±1℃.
4. The furnace lining uses high-purity alumina lightweight fiber material for better insulation, energy saving, and consumption reduction.
5. IoT functionality (WIFI) allows remote monitoring and operation of the equipment via mobile phone or computer.
6. Data storage function can save important sintering parameters for up to 30 days (8 hours of operation per day).
7. Recipe function allows pre-storage of more than 20 recipes.
8. Networking capability through an RJ45 interface using TCP/IP protocol, enabling the system to connect with an upper computer (which requires appropriate software installed).

Technical Parameters of Fluidized Bed FBCVD Furnace:

Model	FB1200-VT3
Tmax	1150℃
Power Supply	Three phase 380V 50HZ
Rated Power	8KW
Quantity of Heating Zone	Three zones and three controls
Temperature Control Precision	±1℃
Sensor Type	K-type thermocouple
Temperature Zone Dimensions	φ150*（200+400+200）mm
Furnace Dimensions	L 1100×H 1970×D 670mm
Control System				Sintering Process Curve Setting: Dynamically displays the set curve. The device can store multiple sintering process curves, each of which can be freely set. Sintering Scheduling: Allows for unattended sintering process curve execution. Real-time Display: Displays sintering power, voltage, and other information in real time, records sintering data, and allows for paperless data export. Remote Control: Enables remote operation and real-time monitoring of the equipment status. lTemperature Correction: Non-linear correction of the difference between the main control temperature and the sample temperature throughout the sintering process.
Equipment Details	1400 mm high-purity quartz tube with 16-40 µm quartz sand filter plate
Heating Elements				Mo-doped Fe-Cr-Al alloy
Sealing System
	Vacuum Degree: 10 Pa (mechanical pump)
Pressure Measurement and Monitoring		Uses a mechanical pressure gauge with a gas-tight shell structure, effectively protecting internal components from environmental impact and debris intrusion, and is highly resistant to corrosion and high temperatures.
Gas Supply System		Uses a float flow meter to control gas flow rate, integrated with the equipment, and leak-tested before shipment.( Additionally, a more precise proton flow meter can be installed as needed.)
Net Weight	Approximately 260 kg
Service Support	One-year warranty with lifetime support (The warranty does not cover consumable parts such as the process tube and O-rings. Please order replacements in the related products section).

Applications

The Laboratory Compact Fluidized Bed CVD Furnace is used in a variety of industries for thin film deposition, material synthesis, and research. Key applications include:

1. Semiconductor Manufacturing: Depositing thin films of materials like silicon and metals for electronic components.
2. Nanomaterial Synthesis: Producing carbon nanotubes, graphene, and other nanomaterials for electronics and energy storage.
3. Coatings: Applying coatings for aerospace, automotive, and catalyst applications, improving wear resistance and performance.
4. Battery and Solar Cell Research: Depositing materials for anodes, cathodes, and thin-film solar cells.
5. Biomedical Applications: Coating medical devices with biocompatible or bioactive films for implants and prosthetics.
6. Environmental Sensors: Fabricating sensor coatings for gas detection and environmental monitoring.

In summary, the laboratory compact fluidized bed CVD furnace serves a wide array of applications across industries like semiconductor manufacturing, nanomaterials, coatings, energy, biomedical, and environmental research.

For More Info about FBCVD

Please read our blog [Fluidized Bed Technology]

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Please visit our website [CVD Furnaces Collection]