Five-Temperature Zone CVD Furnace

 Five-Temperature Zone CVD Furnace

Applications:

Chemical Vapor Deposition (CVD)

Synthesize coatings or nanomaterials

Depositing thin film materials

Synthesize insulating materials as well as most metal and metal alloy materials.

Fields:

Semiconductor industry

Materials laboratories

Universities

Research institutes

Environmental science and other fields

Introduction:

Chemical Vapor Deposition (CVD) refers to a method where chemical gases or vapors react on the surface of a substrate to synthesize coatings or nanomaterials. It is the most widely used technology in the semiconductor industry for depositing thin film materials, including a broad range of insulating materials as well as most metal and metal alloy materials. In response to this, we have developed a comprehensive CVD coating system suitable for materials laboratories in major universities, research institutes, environmental science, and other fields.

Five-Temperature Zone CVD Furnace consists of the following components:

•  Sintering System;
•  Electrical Control System;
• Top Cover Opening System;
• Vacuum System.

Main Features:

1. Stable and reliable control, user-friendly operation.
2. Utilizes advanced PID self-learning fuzzy control for high temperature control accuracy, maintaining within ±1℃.
3. Furnace lining adopts high-purity alumina lightweight fiber material, providing superior insulation and energy efficiency.
4. Data storage function, capable of retaining essential sintering parameters for up to 30 days (with 8 hours of operation per day).
5. Formula management function, able to store and retrieve more than 100 pre-set formulas.
6. Independent control of five temperature zones, allowing for a diverse and complex sintering process tailored to customer requirements.
7. Networking capability through RJ45 interface, employing TCP/IP protocol for seamless connection to an upper-level system (requires installation of corresponding software on the upper-level system).

Technical Parameters:

Model	T1200-100T5G4F
Power supply	380V 50HZ
Rated power	10KW
Thermocouple	K type
Max temperature	1150.C
Recommend Heating rate	10.C/min
Furnace heating chamber	Dia 150* 1135mm
Tube size	Dia 100* 1600mm
Temperature accuracy	+/- 1 ℃
Heating element	Molybdenum-Doped Fe-Cr-Al Alloy High-Temperature Heating Wire
Sealing System
	Vacuum level：≤10Pa（Mechanical Pump）
Pressure Measurement and Monitoring	Utilizing a mechanical pressure gauge with shock-absorbing oil to introduce damping effects during pressure fluctuations, reducing the back-and-forth oscillation of the pointer.
Control System	Sintering Process Curve Settings: Dynamically display and set curves; the equipment allows for the storage of multiple sintering process curves, and each curve can be freely configured. Scheduled Sintering: Enable unattended sintering by pre-scheduling sintering process curves. Real-time Display of Sintering Parameters: Real-time display of sintering power, voltage, and other information; recording of sintering data with the option to export for paperless records. Remote Control Capability: Capable of remote operation and real-time monitoring of equipment status. Temperature Calibration: Non-linear correction of the entire sintering process based on the temperature difference between the main control temperature and the sample temperature.
Protection	Built in protection for over-heated and broken thermal couple, and leakage.
Dimension	1900(L) * 900(W) * 1250(H)mm
Weight	350KG
Warranty	One-year warranty, lifetime support (excluding consumable parts such as furnace tubes, O-rings )